HMDS oven/Pretreatment oven/Coating oven
MOQ: 1 Pieces
Delivery time: 15 Day
High-efficiency heating and uniform temperature distribution, precise temperature control and stability, diverse applications and flexibility, energy conservation and environmental protection, multiple protections, durable structure, automation and intelligence, enhancing product quality and consistency
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Product Details
Process flow：
Vacuuming - helium filling - vacuuming - HMDS filling - baking
Main features：
SUS316# stainless steel inner liner;
Explosion-proof door and window design
It is used for the pretreatment of HWMDS in the photoresist coating process.